Growth And Characterization Of AlGaN Thin Films Via Sol-gel Spin Coating Method
In this study, the growth and characterization of aluminum gallium nitride (AlGaN) thin film grown on AlN/Si(Ill) template via sol-gel spin coating method were reported. The structural, morphological and optical properties of AlGaN thin film were compared with GaN thin film which prepared using the...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48788/ http://eprints.usm.my/48788/1/NG9.pdf%20done.pdf |
| _version_ | 1848881254840139776 |
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| author | Isa, Nurul Atikah Mohd Sha, Shiong Ng Hassan, Zainuriah |
| author_facet | Isa, Nurul Atikah Mohd Sha, Shiong Ng Hassan, Zainuriah |
| author_sort | Isa, Nurul Atikah Mohd |
| building | USM Institutional Repository |
| collection | Online Access |
| description | In this study, the growth and characterization of aluminum gallium nitride (AlGaN) thin film grown on AlN/Si(Ill) template via sol-gel spin coating method were reported. The structural, morphological and optical properties of AlGaN thin film were compared with GaN thin film which prepared using the same method. The structural and morphological properties of the deposited films were characterized using X-ray diffi·action (XRD), field -emission scanning electron microscope (FESEM) and atomic force microscopy (AFM). XRD results revealed that all the
deposited GaN and AlGaN thin films have wurtzite structure and with preferred growth orientation of (002). The FESEM and AFM revealed that the deposited GaN and AlGaN thin films have uniform and smooth surface.
However, the AIGaN thin film exhibits more packed grain as compared to GaN. The optical characteristics of the
GaN and A!GaN thin films were excessed by using Fourier transform infrared (FTIR) spectrometer. It was observed
from the FTIR results that the E1(TO) peak was shifted to higher wavenumber for the AlGaN sample. |
| first_indexed | 2025-11-15T18:16:06Z |
| format | Conference or Workshop Item |
| id | usm-48788 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T18:16:06Z |
| publishDate | 2016 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-487882021-04-06T01:09:42Z http://eprints.usm.my/48788/ Growth And Characterization Of AlGaN Thin Films Via Sol-gel Spin Coating Method Isa, Nurul Atikah Mohd Sha, Shiong Ng Hassan, Zainuriah QC1-999 Physics In this study, the growth and characterization of aluminum gallium nitride (AlGaN) thin film grown on AlN/Si(Ill) template via sol-gel spin coating method were reported. The structural, morphological and optical properties of AlGaN thin film were compared with GaN thin film which prepared using the same method. The structural and morphological properties of the deposited films were characterized using X-ray diffi·action (XRD), field -emission scanning electron microscope (FESEM) and atomic force microscopy (AFM). XRD results revealed that all the deposited GaN and AlGaN thin films have wurtzite structure and with preferred growth orientation of (002). The FESEM and AFM revealed that the deposited GaN and AlGaN thin films have uniform and smooth surface. However, the AIGaN thin film exhibits more packed grain as compared to GaN. The optical characteristics of the GaN and A!GaN thin films were excessed by using Fourier transform infrared (FTIR) spectrometer. It was observed from the FTIR results that the E1(TO) peak was shifted to higher wavenumber for the AlGaN sample. 2016-04-23 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/48788/1/NG9.pdf%20done.pdf Isa, Nurul Atikah Mohd and Sha, Shiong Ng and Hassan, Zainuriah (2016) Growth And Characterization Of AlGaN Thin Films Via Sol-gel Spin Coating Method. In: International Science, Technology and Engineering Conference (ISTEC) 2016. |
| spellingShingle | QC1-999 Physics Isa, Nurul Atikah Mohd Sha, Shiong Ng Hassan, Zainuriah Growth And Characterization Of AlGaN Thin Films Via Sol-gel Spin Coating Method |
| title | Growth And Characterization Of AlGaN Thin Films Via Sol-gel
Spin Coating Method |
| title_full | Growth And Characterization Of AlGaN Thin Films Via Sol-gel
Spin Coating Method |
| title_fullStr | Growth And Characterization Of AlGaN Thin Films Via Sol-gel
Spin Coating Method |
| title_full_unstemmed | Growth And Characterization Of AlGaN Thin Films Via Sol-gel
Spin Coating Method |
| title_short | Growth And Characterization Of AlGaN Thin Films Via Sol-gel
Spin Coating Method |
| title_sort | growth and characterization of algan thin films via sol-gel
spin coating method |
| topic | QC1-999 Physics |
| url | http://eprints.usm.my/48788/ http://eprints.usm.my/48788/1/NG9.pdf%20done.pdf |