Effect of Films Thickness on the Surface and Structural Properties of InN Films Grown on Flexible Substrate

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Effect of Films Thickness on the Surface and Structural Properties of InN Films Grown on Flexible Substrate

In this study, indium nitride (InN) thin films were grown on flexible substrate by radio fi·equency reactive sputtering technique. An indium target with purity of99.999% was used. Throughout this work, the RF power and the gas ratio of argon and nitrogen were maintained constant at 60 W and 40:60...

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Bibliographic Details
Main Authors:	Osman, Siti Aisyah, Sha, Shiong Ng, Fong, Kwong Yam
Format:	Conference or Workshop Item
Language:	English
Published:	2016
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48786/ http://eprints.usm.my/48786/1/NG6.pdf%20done.pdf

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