Effects of Ammonia Flow Rate on the Synthesis of AIGaN Thin Films prepared via Spin Coating Approach

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Effects of Ammonia Flow Rate on the Synthesis of AIGaN Thin Films prepared via Spin Coating Approach

We report on the growth or th e aluminum gallium nitride (A IGaN) thin film s on aluminum nitride (AIN) on silicon (Ill) tem plate via sol- gel spin coating method followed by nitridation process. The nitridation process was carried out for 75 min unlk r ammonia (NH3) ambient. To investigate the ef...

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Bibliographic Details
Main Authors:	lsa, Nurul Atikah Mohd, Sha, Shiong Ng, Hassan, Zainuriah
Format:	Conference or Workshop Item
Language:	English
Published:	2016
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48784/ http://eprints.usm.my/48784/1/NG5.pdf%20done.pdf

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