An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method
In this research, the gallium nitride (GaN) thin films were deposited on a luminium nitride on sapphire (AIN/AI2O3) substrate by sol-gel spin coating method. Simple ethanol based precursor with the addition of diethanolamine solution was used. The structural and morphology properties of synthesized...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
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| Online Access: | http://eprints.usm.my/48781/ http://eprints.usm.my/48781/1/NG10.pdf%20done.pdf |
| _version_ | 1848881252753473536 |
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| author | Amin, NurFahana Mohd Fang, Chee Yang Ng, Sha Shiong |
| author_facet | Amin, NurFahana Mohd Fang, Chee Yang Ng, Sha Shiong |
| author_sort | Amin, NurFahana Mohd |
| building | USM Institutional Repository |
| collection | Online Access |
| description | In this research, the gallium nitride (GaN) thin films were deposited on a luminium nitride on sapphire (AIN/AI2O3) substrate by sol-gel spin coating method. Simple ethanol based precursor with the addition of diethanolamine solution was used. The structural and morphology properties of synthesized GaN thin films were characterized by using Xr ays di ffraction (XRD), field-emission scanning electron microscopy (FESEM), atomic force microscopy, and energy dispersive X-rays spectroscopy. XRD results revealed that the deposited GaN thin films have wurtzite structure and with GaN(OOZ) preferred orientation . FESEM images show that GaN thin films with uniform and packed grains were formed. Based on the obtained results, it can be concluded that wurtzite structure GaN thin films were succesfully deposited on AIN/AI2O3, substrate by using inexpensive and simplified sol-gel spin coating technique. |
| first_indexed | 2025-11-15T18:16:04Z |
| format | Conference or Workshop Item |
| id | usm-48781 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T18:16:04Z |
| publishDate | 2016 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-487812021-04-05T02:20:27Z http://eprints.usm.my/48781/ An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method Amin, NurFahana Mohd Fang, Chee Yang Ng, Sha Shiong QC1-999 Physics In this research, the gallium nitride (GaN) thin films were deposited on a luminium nitride on sapphire (AIN/AI2O3) substrate by sol-gel spin coating method. Simple ethanol based precursor with the addition of diethanolamine solution was used. The structural and morphology properties of synthesized GaN thin films were characterized by using Xr ays di ffraction (XRD), field-emission scanning electron microscopy (FESEM), atomic force microscopy, and energy dispersive X-rays spectroscopy. XRD results revealed that the deposited GaN thin films have wurtzite structure and with GaN(OOZ) preferred orientation . FESEM images show that GaN thin films with uniform and packed grains were formed. Based on the obtained results, it can be concluded that wurtzite structure GaN thin films were succesfully deposited on AIN/AI2O3, substrate by using inexpensive and simplified sol-gel spin coating technique. 2016-11-29 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/48781/1/NG10.pdf%20done.pdf Amin, NurFahana Mohd and Fang, Chee Yang and Ng, Sha Shiong (2016) An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method. In: Advanced Material Conference 2016 (AMC). |
| spellingShingle | QC1-999 Physics Amin, NurFahana Mohd Fang, Chee Yang Ng, Sha Shiong An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method |
| title | An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method |
| title_full | An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method |
| title_fullStr | An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method |
| title_full_unstemmed | An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method |
| title_short | An Investigation Of GaN Thin Films On Ain Sapphire Substrate By Sol-Gel Spin Coating Method |
| title_sort | investigation of gan thin films on ain sapphire substrate by sol-gel spin coating method |
| topic | QC1-999 Physics |
| url | http://eprints.usm.my/48781/ http://eprints.usm.my/48781/1/NG10.pdf%20done.pdf |