Influences of Thermal stability of Doped Indium Nitride Thin Films at Elevated Temperatures by Sol-Gel spin Coating Method

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Influences of Thermal stability of Doped Indium Nitride Thin Films at Elevated Temperatures by Sol-Gel spin Coating Method

In this study, doped indium nitride (InN:Mg) thin films grown on silicon ( Ill) substrate are prepared via so l-gel spin coating method followed by nitridation process. The degree of nitrid at ion of ln 20 3 to InN was very sensitive to the nitridat ion temperature. A custo-made tube furnace was u...

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Bibliographic Details
Main Authors:	Hui, San Lee, Sha, Shiong Ng, Fong, Kwong Yam
Format:	Conference or Workshop Item
Language:	English
Published:	2016
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48776/ http://eprints.usm.my/48776/1/NG2.pdf%20done.pdf

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