Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method

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Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method

In this study, indium nitride (InN) thin films were deposited on kapton polymide flexible substrate by reactive radio frequency (RF) sputtering method using indium target in a mixture of Ar and N2 gases. The InN thin films were deposited under different substrate temperatures, i.e., 1 00°C and 20...

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Bibliographic Details
Main Authors:	Osman, Siti Aisyah, Lee, Zhi Yin, Fong, Chee Yong, Ng, Sha Shiong
Format:	Conference or Workshop Item
Language:	English
Published:	2015
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48735/ http://eprints.usm.my/48735/1/Section%20C%20157-2.pdf%20cut.pdf

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