Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method
In this study, indium nitride (InN) thin films were deposited on kapton polymide flexible substrate by reactive radio frequency (RF) sputtering method using indium target in a mixture of Ar and N2 gases. The InN thin films were deposited under different substrate temperatures, i.e., 1 00°C and 20...
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| Format: | Conference or Workshop Item |
| Language: | English |
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2015
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| Online Access: | http://eprints.usm.my/48735/ http://eprints.usm.my/48735/1/Section%20C%20157-2.pdf%20cut.pdf |
| _version_ | 1848881238989864960 |
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| author | Osman, Siti Aisyah Lee, Zhi Yin Fong, Chee Yong Ng, Sha Shiong |
| author_facet | Osman, Siti Aisyah Lee, Zhi Yin Fong, Chee Yong Ng, Sha Shiong |
| author_sort | Osman, Siti Aisyah |
| building | USM Institutional Repository |
| collection | Online Access |
| description | In this study, indium nitride (InN) thin films were deposited on kapton polymide flexible
substrate by reactive radio frequency (RF) sputtering method using indium target in a mixture of Ar
and N2 gases. The InN thin films were deposited under different substrate temperatures, i.e., 1 00°C
and 200°C. The effects of substrate temperature on structural, surface morphologies and optical
properties of InN thin films were systematically investigated by using X-ray diffraction technique, field
emission scanning electron microscope, energy dispersive X-ray spectroscopy, and Fourier transform
infrared spectroscopy. |
| first_indexed | 2025-11-15T18:15:51Z |
| format | Conference or Workshop Item |
| id | usm-48735 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T18:15:51Z |
| publishDate | 2015 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-487352021-03-31T06:19:29Z http://eprints.usm.my/48735/ Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method Osman, Siti Aisyah Lee, Zhi Yin Fong, Chee Yong Ng, Sha Shiong QC1-999 Physics In this study, indium nitride (InN) thin films were deposited on kapton polymide flexible substrate by reactive radio frequency (RF) sputtering method using indium target in a mixture of Ar and N2 gases. The InN thin films were deposited under different substrate temperatures, i.e., 1 00°C and 200°C. The effects of substrate temperature on structural, surface morphologies and optical properties of InN thin films were systematically investigated by using X-ray diffraction technique, field emission scanning electron microscope, energy dispersive X-ray spectroscopy, and Fourier transform infrared spectroscopy. 2015-06-09 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/48735/1/Section%20C%20157-2.pdf%20cut.pdf Osman, Siti Aisyah and Lee, Zhi Yin and Fong, Chee Yong and Ng, Sha Shiong (2015) Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method. In: 2nd Meeting of Malaysia Nitrides Research Group (MNRG 2015). |
| spellingShingle | QC1-999 Physics Osman, Siti Aisyah Lee, Zhi Yin Fong, Chee Yong Ng, Sha Shiong Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method |
| title | Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method |
| title_full | Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method |
| title_fullStr | Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method |
| title_full_unstemmed | Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method |
| title_short | Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method |
| title_sort | effects of substrate temperature on the properties of indium nitride thin films grown on flexible prepared by reactive sputtering method |
| topic | QC1-999 Physics |
| url | http://eprints.usm.my/48735/ http://eprints.usm.my/48735/1/Section%20C%20157-2.pdf%20cut.pdf |