Development Of Tetragonal Zirconia Thin Film For Semiconductor Application

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Development Of Tetragonal Zirconia Thin Film For Semiconductor Application

In this work, the YSZ and Nb-YSZ film were produced by using chemical solution deposition (CSD) technique via dip coating. The films were deposited on two different substrates (silica glass and Si wafer). Various parameters were conducted in this study including numbers of coatings, concentration of...

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Bibliographic Details
Main Author:	Chan, Pooi Quan
Format:	Thesis
Language:	English
Published:	2011
Subjects:	TN1-997 Mining engineering. Metallurgy
Online Access:	http://eprints.usm.my/43232/ http://eprints.usm.my/43232/1/CHAN%20POOI%20QUAN.PDF

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