Investigation Of Metal Organic Deposition Derived
Cerium Oxide Thin Films On Silicon Wafer

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Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer

Cerium oxide (CeO2) thin films have been formed on silicon (Si) substrates via metal organic decomposition route in order to resolve the usefulness of this oxide as an alternative gate dielectric for Si-based metal-oxide-semiconductor (MOS) applications. Salts of cerium(III) nitrate and ceriu...

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Bibliographic Details
Main Author:	Jasni, Farah Anis
Format:	Thesis
Language:	English
Published:	2009
Subjects:	TN1-997 Mining engineering. Metallurgy
Online Access:	http://eprints.usm.my/42928/ http://eprints.usm.my/42928/1/Farah_Anis_Binti_Jasni24.pdf

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