A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors

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A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors

Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films posse...

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Bibliographic Details
Main Author:	al-Hardan, Naif Hammad Misshin
Format:	Thesis
Language:	English
Published:	2011
Subjects:	QC1 Physics (General)
Online Access:	http://eprints.usm.my/42130/ http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf

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