Development Of Spacer Free Self-Aligned Contact Implantation For Power Devices
Mengoptimasi skema proses integrasi bagi sesebuah teknolgi merupakan salah satu faktor penting untuk mengurangkan bilangan kecatatan dan kitaran masa dalam bidang fabrikasi wafer. Dalam pengajian sarjana ini, aliran proses yang dioptimasi bagi menjajarkan penimpalan kontak telah dikaji bagi teknolog...
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| Format: | Thesis |
| Language: | English |
| Published: |
2009
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| Online Access: | http://eprints.usm.my/41784/ http://eprints.usm.my/41784/1/Banu_AP_Poobalan24.pdf |
| _version_ | 1848879382133735424 |
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| author | Poobalan, Banu |
| author_facet | Poobalan, Banu |
| author_sort | Poobalan, Banu |
| building | USM Institutional Repository |
| collection | Online Access |
| description | Mengoptimasi skema proses integrasi bagi sesebuah teknolgi merupakan salah satu faktor penting untuk mengurangkan bilangan kecatatan dan kitaran masa dalam bidang fabrikasi wafer. Dalam pengajian sarjana ini, aliran proses yang dioptimasi bagi menjajarkan penimpalan kontak telah dikaji bagi teknologi Infineoen CoolMOS. Selepas mengaji 3 idea yang berlainan dengan insentif, konsep yang paling berpotensi tinggi dipilih bagi pengoptimasian dan pencirian lanjutan di peringkat wafer dan poduk.
Optimization of the process integration scheme for a technology is one of the key factors within wafer fabrication in order to reduce defect density and production cycle time. Within this master study, an optimized process flow for the self-aligned contact implantation was evaluated for the Infineons CoolMOS technology. After intensive feasibility investigations of 3 different ideas, the most promising concept was further optimized and characterized on wafer level as well as in the final product. |
| first_indexed | 2025-11-15T17:46:20Z |
| format | Thesis |
| id | usm-41784 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T17:46:20Z |
| publishDate | 2009 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-417842019-04-12T05:27:00Z http://eprints.usm.my/41784/ Development Of Spacer Free Self-Aligned Contact Implantation For Power Devices Poobalan, Banu TN1-997 Mining engineering. Metallurgy Mengoptimasi skema proses integrasi bagi sesebuah teknolgi merupakan salah satu faktor penting untuk mengurangkan bilangan kecatatan dan kitaran masa dalam bidang fabrikasi wafer. Dalam pengajian sarjana ini, aliran proses yang dioptimasi bagi menjajarkan penimpalan kontak telah dikaji bagi teknologi Infineoen CoolMOS. Selepas mengaji 3 idea yang berlainan dengan insentif, konsep yang paling berpotensi tinggi dipilih bagi pengoptimasian dan pencirian lanjutan di peringkat wafer dan poduk. Optimization of the process integration scheme for a technology is one of the key factors within wafer fabrication in order to reduce defect density and production cycle time. Within this master study, an optimized process flow for the self-aligned contact implantation was evaluated for the Infineons CoolMOS technology. After intensive feasibility investigations of 3 different ideas, the most promising concept was further optimized and characterized on wafer level as well as in the final product. 2009-11 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/41784/1/Banu_AP_Poobalan24.pdf Poobalan, Banu (2009) Development Of Spacer Free Self-Aligned Contact Implantation For Power Devices. Masters thesis, Universiti Sains Malaysia. |
| spellingShingle | TN1-997 Mining engineering. Metallurgy Poobalan, Banu Development Of Spacer Free Self-Aligned Contact Implantation For Power Devices |
| title | Development Of Spacer Free
Self-Aligned Contact Implantation For Power Devices
|
| title_full | Development Of Spacer Free
Self-Aligned Contact Implantation For Power Devices
|
| title_fullStr | Development Of Spacer Free
Self-Aligned Contact Implantation For Power Devices
|
| title_full_unstemmed | Development Of Spacer Free
Self-Aligned Contact Implantation For Power Devices
|
| title_short | Development Of Spacer Free
Self-Aligned Contact Implantation For Power Devices
|
| title_sort | development of spacer free
self-aligned contact implantation for power devices |
| topic | TN1-997 Mining engineering. Metallurgy |
| url | http://eprints.usm.my/41784/ http://eprints.usm.my/41784/1/Banu_AP_Poobalan24.pdf |