Pemeriksaan Filem SiO2 Yang Dienapkan Di Atas Susbtrat Si Melalui Teknik Pirolisis Semburan Ultrabunyi

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Pemeriksaan Filem SiO2 Yang Dienapkan Di Atas Susbtrat Si Melalui Teknik Pirolisis Semburan Ultrabunyi

Pirolisis semburan ultrabunyi (PSU) telah digunakan untuk mengenapkan filem SiO2 di atas substrat Si. Dalam rangka pengenapan oksida di atas Si, reaktor USP telah direkabentuk dan dibina. Prapenanda yang digunakan sebagai sumber oksida ini adalah berdasarkan larutan Tetraetoksilana dan disediakan de...

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Bibliographic Details
Main Author:	Nugroho, Cahyo Budi
Format:	Thesis
Language:	English
Published:	2010
Subjects:	TN1-997 Mining engineering. Metallurgy
Online Access:	http://eprints.usm.my/41649/ http://eprints.usm.my/41649/1/CAHYO_BUDI.pdf

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