Development Of 3D Microstructures By Using Grayscale Photolithographic Technique

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Development Of 3D Microstructures By Using Grayscale Photolithographic Technique

Perkembangan pesat teknologi seperti bio-chip, peranti pendalir mikro, peranti mikro-optik dan sistem mikro elektro-mekanikal (MEMS) memerlukan keupayaan membina struktur tiga dimensi (3D) yang kompleks di skala mikro. Bagi membina struktur 3D di skala mikro, kebiasaannya beberapa topeng cahaya digu...

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Bibliographic Details
Main Author:	Lee , Tze Pin
Format:	Thesis
Language:	English
Published:	2016
Subjects:	T Technology TJ1-1570 Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/41609/ http://eprints.usm.my/41609/1/Development_Of_3D_Microstructures_By_Using_Grayscale_Photolithographic_Technique.pdf

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