Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique
ZnO films have been successfully deposited by Atomic Layer Deposition (ALD) using Diethylzinc (DEZn) and water (H2O) as precursors.
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Online Access: | http://eprints.usm.my/25179/ http://eprints.usm.my/25179/1/STRUCTURAL_AND_OPTICAL_PROPERTIES_OF_ZnO_THIN_FILMS_DEPOSITED_USING_ATOMIC_LAYER_DEPOSITION_TECHNIQUE.pdf |
| _version_ | 1848875070817042432 |
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| author | PPKBSM, Pusat Pengajian Bahan & Sumber Mineral |
| author_facet | PPKBSM, Pusat Pengajian Bahan & Sumber Mineral |
| author_sort | PPKBSM, Pusat Pengajian Bahan & Sumber Mineral |
| building | USM Institutional Repository |
| collection | Online Access |
| description | ZnO films have been successfully deposited by Atomic Layer Deposition (ALD) using Diethylzinc (DEZn) and water (H2O) as precursors. |
| first_indexed | 2025-11-15T16:37:49Z |
| format | Conference or Workshop Item |
| id | usm-25179 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T16:37:49Z |
| publishDate | 2011 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-251792013-07-13T09:59:12Z http://eprints.usm.my/25179/ Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique PPKBSM, Pusat Pengajian Bahan & Sumber Mineral TN1-997 Mining engineering. Metallurgy ZnO films have been successfully deposited by Atomic Layer Deposition (ALD) using Diethylzinc (DEZn) and water (H2O) as precursors. 2011-11 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/25179/1/STRUCTURAL_AND_OPTICAL_PROPERTIES_OF_ZnO_THIN_FILMS_DEPOSITED_USING_ATOMIC_LAYER_DEPOSITION_TECHNIQUE.pdf PPKBSM, Pusat Pengajian Bahan & Sumber Mineral (2011) Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique. In: 3rd International Workshop on Nanotechnology & Application 2011, 10 – 12 November 2011, Vung Tau, Vietnam. |
| spellingShingle | TN1-997 Mining engineering. Metallurgy PPKBSM, Pusat Pengajian Bahan & Sumber Mineral Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique |
| title | Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique |
| title_full | Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique |
| title_fullStr | Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique |
| title_full_unstemmed | Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique |
| title_short | Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique |
| title_sort | structural and optical properties of zno thin films deposited using atomic layer deposition technique |
| topic | TN1-997 Mining engineering. Metallurgy |
| url | http://eprints.usm.my/25179/ http://eprints.usm.my/25179/1/STRUCTURAL_AND_OPTICAL_PROPERTIES_OF_ZnO_THIN_FILMS_DEPOSITED_USING_ATOMIC_LAYER_DEPOSITION_TECHNIQUE.pdf |