Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC.

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Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC.

Metal-Oxide-Semiconductor FETs using 4H-SiC have been investigated intensively because 4H-SiC semiconductor has excellent physical properties for power-device applications.

Bibliographic Details
Main Authors:	Jeong, Hyun Moon, Kuan, Yew Cheong, Ho, Keun Song, Jeong, Hyuk Yim, Myeong, Suk Oh, Jong, Ho Lee, Bahng, Wook, Nam, Kyun Kim, Hyeong, Joon Kim
Format:	Conference or Workshop Item
Language:	English
Published:	2007
Subjects:	TN1-997 Mining engineering. Metallurgy
Online Access:	http://eprints.usm.my/13610/ http://eprints.usm.my/13610/1/Effect_of_nitric.pdf

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