Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC.
Metal-Oxide-Semiconductor FETs using 4H-SiC have been investigated intensively because 4H-SiC semiconductor has excellent physical properties for power-device applications.
| Main Authors: | , , , , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://eprints.usm.my/13610/ http://eprints.usm.my/13610/1/Effect_of_nitric.pdf |
| _version_ | 1848871800390287360 |
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| author | Jeong, Hyun Moon Kuan, Yew Cheong Ho, Keun Song Jeong, Hyuk Yim Myeong, Suk Oh Jong, Ho Lee Bahng, Wook Nam, Kyun Kim Hyeong, Joon Kim |
| author_facet | Jeong, Hyun Moon Kuan, Yew Cheong Ho, Keun Song Jeong, Hyuk Yim Myeong, Suk Oh Jong, Ho Lee Bahng, Wook Nam, Kyun Kim Hyeong, Joon Kim |
| author_sort | Jeong, Hyun Moon |
| building | USM Institutional Repository |
| collection | Online Access |
| description | Metal-Oxide-Semiconductor FETs using 4H-SiC have been investigated intensively because 4H-SiC semiconductor has excellent physical properties for power-device applications.
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| first_indexed | 2025-11-15T15:45:50Z |
| format | Conference or Workshop Item |
| id | usm-13610 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T15:45:50Z |
| publishDate | 2007 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-136102013-07-13T05:21:09Z http://eprints.usm.my/13610/ Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. Jeong, Hyun Moon Kuan, Yew Cheong Ho, Keun Song Jeong, Hyuk Yim Myeong, Suk Oh Jong, Ho Lee Bahng, Wook Nam, Kyun Kim Hyeong, Joon Kim TN1-997 Mining engineering. Metallurgy Metal-Oxide-Semiconductor FETs using 4H-SiC have been investigated intensively because 4H-SiC semiconductor has excellent physical properties for power-device applications. 2007 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/13610/1/Effect_of_nitric.pdf Jeong, Hyun Moon and Kuan, Yew Cheong and Ho, Keun Song and Jeong, Hyuk Yim and Myeong, Suk Oh and Jong, Ho Lee and Bahng, Wook and Nam, Kyun Kim and Hyeong, Joon Kim (2007) Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. In: International Conference Silicon Carbide and Related Materials 2007 (ICSCRM2007), 14 – 19 October 2007, Otsu Prince Hotel Convention Hall, Lake Biwa Resort, Otsu Japan. |
| spellingShingle | TN1-997 Mining engineering. Metallurgy Jeong, Hyun Moon Kuan, Yew Cheong Ho, Keun Song Jeong, Hyuk Yim Myeong, Suk Oh Jong, Ho Lee Bahng, Wook Nam, Kyun Kim Hyeong, Joon Kim Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. |
| title | Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. |
| title_full | Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. |
| title_fullStr | Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. |
| title_full_unstemmed | Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. |
| title_short | Effect Of Nitric-Oxide Post-Oxidation Annealing On High-Temperature Oxidized 4H SiC. |
| title_sort | effect of nitric-oxide post-oxidation annealing on high-temperature oxidized 4h sic. |
| topic | TN1-997 Mining engineering. Metallurgy |
| url | http://eprints.usm.my/13610/ http://eprints.usm.my/13610/1/Effect_of_nitric.pdf |