Investigation of low dielectric constant (k) films for deep sub-micron CMOS application.
Silica (Si02) thin film on Si with low dielectric constant (k) properties has been systematically prepared and investigated. Two types of this low-k material have been deposited on Si via sol-gel spin-on coating. Filem nipis silika (Si02) yang berpemalar dieletrik rendah endap di atas Si tlah dis...
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| Format: | Monograph |
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Universiti Sains Malaysia
2007
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| Online Access: | http://eprints.usm.my/10419/ |
| _version_ | 1848870975394807808 |
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| author | Cheon'g, Kuan Yew Hussain, Luay Bakir |
| author_facet | Cheon'g, Kuan Yew Hussain, Luay Bakir |
| author_sort | Cheon'g, Kuan Yew |
| building | USM Institutional Repository |
| collection | Online Access |
| description | Silica (Si02) thin film on Si with low dielectric constant (k) properties has been systematically prepared and investigated. Two types of this low-k material have been deposited on Si via sol-gel spin-on coating.
Filem nipis silika (Si02) yang berpemalar dieletrik rendah endap di atas Si tlah disediakan dan dikaji dengan sistematik. Dua jenis film nipis telah disediakan menggunkan pemutaran sol-gel.
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| first_indexed | 2025-11-15T15:32:43Z |
| format | Monograph |
| id | usm-10419 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-15T15:32:43Z |
| publishDate | 2007 |
| publisher | Universiti Sains Malaysia |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-104192017-09-21T03:16:46Z http://eprints.usm.my/10419/ Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. Cheon'g, Kuan Yew Hussain, Luay Bakir TN1-997 Mining engineering. Metallurgy Silica (Si02) thin film on Si with low dielectric constant (k) properties has been systematically prepared and investigated. Two types of this low-k material have been deposited on Si via sol-gel spin-on coating. Filem nipis silika (Si02) yang berpemalar dieletrik rendah endap di atas Si tlah disediakan dan dikaji dengan sistematik. Dua jenis film nipis telah disediakan menggunkan pemutaran sol-gel. Universiti Sains Malaysia 2007 Monograph NonPeerReviewed Cheon'g, Kuan Yew and Hussain, Luay Bakir (2007) Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. Project Report. Universiti Sains Malaysia. |
| spellingShingle | TN1-997 Mining engineering. Metallurgy Cheon'g, Kuan Yew Hussain, Luay Bakir Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. |
| title | Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. |
| title_full | Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. |
| title_fullStr | Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. |
| title_full_unstemmed | Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. |
| title_short | Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. |
| title_sort | investigation of low dielectric constant (k) films for deep sub-micron cmos application. |
| topic | TN1-997 Mining engineering. Metallurgy |
| url | http://eprints.usm.my/10419/ |