Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films

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Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films

Using the radiofrequency (RF) magnetron sputtering method, zinc oxide (ZnO) thin films were optimized for the optical hydrogen gas sensor at 27 °C. To generate optically controlled thin films, the following parameters have been optimized: argon/oxygen (Ar/O2), RF power, gas concentration and deposit...

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Bibliographic Details
Main Authors:	Mustaffa, Siti Nor Aliffah, Ariffin, Nurul Assikin, Khalaf, Ahmed Lateef, Yaacob, Mohd. Hanif, Tamchek, Nizam, Paiman, Suriati, Sagadevan, Suresh
Format:	Article
Published:	Elsevier Editora 2020
Online Access:	http://psasir.upm.edu.my/id/eprint/85793/

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