Lithography method for selective area of CNTs growth

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Lithography method for selective area of CNTs growth

This paper presents the processes of fabrication method in the selective area of growth Carbon Nanotubes (CNTs) on the substrate with an Interdigitated (IDE) electrodes pattern using resist AZ1500. The substrate used in this work was Gallium Phosphate with Chromium (0.021μm) and Platinum (0.11μm) as...

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Bibliographic Details
Main Authors:	Fauthan, Aishah, Hamidon, Mohd Nizar, Yeop Majlis, Burhanuddin, Z., Yunuza
Format:	Conference or Workshop Item
Language:	English
Published:	IEEE 2013
Online Access:	http://psasir.upm.edu.my/id/eprint/69515/ http://psasir.upm.edu.my/id/eprint/69515/1/Lithography%20method%20for%20selective%20area%20of%20CNTs%20growth.pdf

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