Analytical comparison for square, rectangular and circular diaphragms in MEMS applications

Analytical comparison for square, rectangular and circular diaphragms in MEMS applications

MEMS offer different fabrication process to fabricate diaphragms in various applications such as microphones, pressure sensors and micro-pumps, etc. The working principle of all these devices is based on the force applies on the one side of the diaphragm and cause the diaphragm deflects. The paramet...

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Bibliographic Details
Main Authors: Khakpour, Reza, Mansouri, Solmaz Rastegar Moghaddam, Bahadorimehr, Alireza
Format: Conference or Workshop Item
Language:English
Published: IEEE 2010
Online Access:http://psasir.upm.edu.my/id/eprint/69479/
http://psasir.upm.edu.my/id/eprint/69479/1/Analytical%20comparison%20for%20square%2C%20rectangular%20and%20circular%20diaphragms%20in%20MEMS%20applications.pdf

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