A novel neural network model of capacitive MEMS accelerometers

A novel neural network model of capacitive MEMS accelerometers

This paper presents a nonlinear model for a capacitive Micro-electromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the folded-flexure spring. To solving this equation we use FEA method. The neural network (NN) uses Levenberg-Ma...

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Bibliographic Details
Main Authors: Bahadorimehr, Alireza, Hamidon, Mohd Nizar, Hezarjaribi, Yadollah
Format: Conference or Workshop Item
Language:English
Published: IEEE 2008
Online Access:http://psasir.upm.edu.my/id/eprint/69365/
http://psasir.upm.edu.my/id/eprint/69365/1/A%20novel%20neural%20network%20model%20of%20capacitive%20MEMS%20accelerometers.pdf

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