Nonlinear modeling of a capacitive MEMS accelerometer using neural network

Nonlinear modeling of a capacitive MEMS accelerometer using neural network

This paper presents a nonlinear model for a capacitive Microelectromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the folded-flexure spring. To solving this equation we use FEA method. The neural network (NN) uses Levenberg-Mar...

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Bibliographic Details
Main Authors: Bahadorimehr, Alireza, Hamidon, Mohd Nizar, Hezarjaribi, Yadollah
Format: Conference or Workshop Item
Language:English
Published: IEEE 2008
Online Access:http://psasir.upm.edu.my/id/eprint/69349/
http://psasir.upm.edu.my/id/eprint/69349/1/Nonlinear%20modeling%20of%20a%20capacitive%20MEMS%20accelerometer%20using%20neural%20network.pdf

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