Carrier Transport and I-V Characterization of Si, An/Si and Ag/Si Silicides Using Photoacoustic and Four Point Probe Techniques

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Carrier Transport and I-V Characterization of Si, An/Si and Ag/Si Silicides Using Photoacoustic and Four Point Probe Techniques

The AdSi and Ag/Si systems have been studied extensively due to the importance of carrier transport and I-V characterization of metal silicide compounds in microelectronic applications. In this study, the metal thin film was deposited on the polished Si substrate and annealed in air environment....

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Bibliographic Details
Main Author:	Yap, Siew Hong
Format:	Thesis
Language:	English English
Published:	2005
Subjects:	Optoacoustic spectroscopy. Silicides.
Online Access:	http://psasir.upm.edu.my/id/eprint/6271/ http://psasir.upm.edu.my/id/eprint/6271/1/FS_2005_43.pdf

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