Sensitivity of piezoresistive pressure sensor with inner diaphragm

Sensitivity of piezoresistive pressure sensor with inner diaphragm

This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to implement inner diaphragm to increase the sensitivity of the sensor. Comparison between the original design and proposed design is made. The adjustment and performance of the proposed design are also...

Full description

Bibliographic Details
Main Authors: Chua, Kean Hong, Ismail, Noor Faezah, Md Yunus, Nurul Amziah, Ahmad, Desa
Format: Conference or Workshop Item
Language:English
Published: IEEE 2017
Online Access:http://psasir.upm.edu.my/id/eprint/59471/
http://psasir.upm.edu.my/id/eprint/59471/1/Sensitivity%20of%20piezoresistive%20pressure%20sensor%20with%20inner%20diaphragm.pdf

Similar Items

Similar Items