Sensitivity of piezoresistive pressure sensor with inner diaphragm
This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to implement inner diaphragm to increase the sensitivity of the sensor. Comparison between the original design and proposed design is made. The adjustment and performance of the proposed design are also...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2017
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| Online Access: | http://psasir.upm.edu.my/id/eprint/59471/ http://psasir.upm.edu.my/id/eprint/59471/1/Sensitivity%20of%20piezoresistive%20pressure%20sensor%20with%20inner%20diaphragm.pdf |
| _version_ | 1848853930603184128 |
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| author | Chua, Kean Hong Ismail, Noor Faezah Md Yunus, Nurul Amziah Ahmad, Desa |
| author_facet | Chua, Kean Hong Ismail, Noor Faezah Md Yunus, Nurul Amziah Ahmad, Desa |
| author_sort | Chua, Kean Hong |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to implement inner diaphragm to increase the sensitivity of the sensor. Comparison between the original design and proposed design is made. The adjustment and performance of the proposed design are also discussed. |
| first_indexed | 2025-11-15T11:01:48Z |
| format | Conference or Workshop Item |
| id | upm-59471 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T11:01:48Z |
| publishDate | 2017 |
| publisher | IEEE |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-594712018-03-06T08:27:32Z http://psasir.upm.edu.my/id/eprint/59471/ Sensitivity of piezoresistive pressure sensor with inner diaphragm Chua, Kean Hong Ismail, Noor Faezah Md Yunus, Nurul Amziah Ahmad, Desa This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to implement inner diaphragm to increase the sensitivity of the sensor. Comparison between the original design and proposed design is made. The adjustment and performance of the proposed design are also discussed. IEEE 2017 Conference or Workshop Item PeerReviewed text en http://psasir.upm.edu.my/id/eprint/59471/1/Sensitivity%20of%20piezoresistive%20pressure%20sensor%20with%20inner%20diaphragm.pdf Chua, Kean Hong and Ismail, Noor Faezah and Md Yunus, Nurul Amziah and Ahmad, Desa (2017) Sensitivity of piezoresistive pressure sensor with inner diaphragm. In: 2017 IEEE Asia Pacific Conference on Postgraduate Research in Microelectronics and Electronics (PrimeAsia), 31 Oct.-2 Nov. 2017, Kuala Lumpur, Malaysia. (pp. 129-132). 10.1109/PRIMEASIA.2017.8280381 |
| spellingShingle | Chua, Kean Hong Ismail, Noor Faezah Md Yunus, Nurul Amziah Ahmad, Desa Sensitivity of piezoresistive pressure sensor with inner diaphragm |
| title | Sensitivity of piezoresistive pressure sensor with inner diaphragm |
| title_full | Sensitivity of piezoresistive pressure sensor with inner diaphragm |
| title_fullStr | Sensitivity of piezoresistive pressure sensor with inner diaphragm |
| title_full_unstemmed | Sensitivity of piezoresistive pressure sensor with inner diaphragm |
| title_short | Sensitivity of piezoresistive pressure sensor with inner diaphragm |
| title_sort | sensitivity of piezoresistive pressure sensor with inner diaphragm |
| url | http://psasir.upm.edu.my/id/eprint/59471/ http://psasir.upm.edu.my/id/eprint/59471/ http://psasir.upm.edu.my/id/eprint/59471/1/Sensitivity%20of%20piezoresistive%20pressure%20sensor%20with%20inner%20diaphragm.pdf |