Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography

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Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography

The realization of reliable nanobiosensor devices requires the improvement of fabrication techniques to form the nanometer-sized structures and patterns, which were used to attach nano materials such as DNA for the device elements. This study demonstrates the sensitivity of silicon nanowires (SiNWs)...

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Bibliographic Details
Main Authors:	Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Hamidon, Mohd Nizar, Mohd Zawawi, Ruzniza, Hashim, Uda
Format:	Conference or Workshop Item
Language:	English
Published:	IEEE 2014
Online Access:	http://psasir.upm.edu.my/id/eprint/55666/ http://psasir.upm.edu.my/id/eprint/55666/1/Top-down%20fabrication%20of%20silicon%20nanowire%20sensor%20using%20electron%20beam%20and%20optical%20mixed%20lithography.pdf

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