APA (7th ed.) Citation

Abd Rahman, S. F., Yusof, N. A., Hamidon, M. N., Mohd Zawawi, R., & Hashim, U. (2014). Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography. IEEE.

Chicago Style (17th ed.) Citation

Abd Rahman, Siti Fatimah, Nor Azah Yusof, Mohd Nizar Hamidon, Ruzniza Mohd Zawawi, and Uda Hashim. Top-down Fabrication of Silicon Nanowire Sensor Using Electron Beam and Optical Mixed Lithography. IEEE, 2014.

MLA (9th ed.) Citation

Abd Rahman, Siti Fatimah, et al. Top-down Fabrication of Silicon Nanowire Sensor Using Electron Beam and Optical Mixed Lithography. IEEE, 2014.

Warning: These citations may not always be 100% accurate.