Plasma polymerization of silicon-containing monomers

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Plasma polymerization of silicon-containing monomers

Plasma depositions of ultra thin films from seven silicon-containing liquid monomers were investigated using a continuos wave (CW) plasma source. The deposition rate of plasma polymerized films were determined using a quartz crystal microbalance (QCM) technique while the film composition were determ...

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Bibliographic Details
Main Authors:	Talib, Zainal Abidin, Kurosawa, Shigeru, Atthoff, Bjorn, Aizawa, Hidenobu, Kashima, Kazuya, Hirokawa, Tomoya, Yoshimi, Yasuo, Yoshimoto, Minoru, Hirotsu, Toshihiro, Miyake, Jun, Hilborn, Jons
Format:	Article
Language:	English English
Published:	The Society of Photopolymer Science and Technology 2001
Online Access:	http://psasir.upm.edu.my/id/eprint/48661/ http://psasir.upm.edu.my/id/eprint/48661/1/Plasma%20polymerization%20of%20silicon-containing%20monomers.pdf http://psasir.upm.edu.my/id/eprint/48661/7/14_129.pdf

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