Process for the determination of thickness of polymeric microchannels for microfluidic applications

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Process for the determination of thickness of polymeric microchannels for microfluidic applications

We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry...

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Bibliographic Details
Main Authors:	Md Yunus, Nurul Amziah, Jaafar, Haslina, Green, Nicolas G.
Format:	Conference or Workshop Item
Language:	English
Published:	IEEE 2011
Online Access:	http://psasir.upm.edu.my/id/eprint/47784/ http://psasir.upm.edu.my/id/eprint/47784/1/Process%20for%20the%20determination%20of%20thickness%20of%20polymeric%20microchannels%20for%20microfluidic%20applications.pdf

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