Process for the determination of thickness of polymeric microchannels for microfluidic applications
We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry...
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2011
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| Online Access: | http://psasir.upm.edu.my/id/eprint/47784/ http://psasir.upm.edu.my/id/eprint/47784/1/Process%20for%20the%20determination%20of%20thickness%20of%20polymeric%20microchannels%20for%20microfluidic%20applications.pdf |
| _version_ | 1848850904746295296 |
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| author | Md Yunus, Nurul Amziah Jaafar, Haslina Green, Nicolas G. |
| author_facet | Md Yunus, Nurul Amziah Jaafar, Haslina Green, Nicolas G. |
| author_sort | Md Yunus, Nurul Amziah |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry has made the current microfluidic devices fabricated not only from silicon substrate but also to a range of polymers and glasses. Our observations are made on the effect of the thickness before and after curing and bonding mechanism of DFR on glass substrate. Therefore the thickness of the channels is recorded. The outcomes of the bonding procedure are captured. These channels are patterned and sandwiched in between two glass substrates. They can be used for handling continuous fluid flow and particle. In our advance, the channel was formed for dielectrophoretic (DEP) colloidal particle separation systems. |
| first_indexed | 2025-11-15T10:13:42Z |
| format | Conference or Workshop Item |
| id | upm-47784 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T10:13:42Z |
| publishDate | 2011 |
| publisher | IEEE |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-477842019-05-28T00:48:45Z http://psasir.upm.edu.my/id/eprint/47784/ Process for the determination of thickness of polymeric microchannels for microfluidic applications Md Yunus, Nurul Amziah Jaafar, Haslina Green, Nicolas G. We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry has made the current microfluidic devices fabricated not only from silicon substrate but also to a range of polymers and glasses. Our observations are made on the effect of the thickness before and after curing and bonding mechanism of DFR on glass substrate. Therefore the thickness of the channels is recorded. The outcomes of the bonding procedure are captured. These channels are patterned and sandwiched in between two glass substrates. They can be used for handling continuous fluid flow and particle. In our advance, the channel was formed for dielectrophoretic (DEP) colloidal particle separation systems. IEEE 2011 Conference or Workshop Item PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/47784/1/Process%20for%20the%20determination%20of%20thickness%20of%20polymeric%20microchannels%20for%20microfluidic%20applications.pdf Md Yunus, Nurul Amziah and Jaafar, Haslina and Green, Nicolas G. (2011) Process for the determination of thickness of polymeric microchannels for microfluidic applications. In: 2011 IEEE Regional Symposium on Micro and Nanoelectronics (RSM 2011), 28-30 Sept. 2011, Le Meridien Hotel, Kota Kinabalu, Sabah. (pp. 344-348). 10.1109/RSM.2011.6088357 |
| spellingShingle | Md Yunus, Nurul Amziah Jaafar, Haslina Green, Nicolas G. Process for the determination of thickness of polymeric microchannels for microfluidic applications |
| title | Process for the determination of thickness of polymeric microchannels for microfluidic applications |
| title_full | Process for the determination of thickness of polymeric microchannels for microfluidic applications |
| title_fullStr | Process for the determination of thickness of polymeric microchannels for microfluidic applications |
| title_full_unstemmed | Process for the determination of thickness of polymeric microchannels for microfluidic applications |
| title_short | Process for the determination of thickness of polymeric microchannels for microfluidic applications |
| title_sort | process for the determination of thickness of polymeric microchannels for microfluidic applications |
| url | http://psasir.upm.edu.my/id/eprint/47784/ http://psasir.upm.edu.my/id/eprint/47784/ http://psasir.upm.edu.my/id/eprint/47784/1/Process%20for%20the%20determination%20of%20thickness%20of%20polymeric%20microchannels%20for%20microfluidic%20applications.pdf |