Valuation on MEMS pressure sensors and device applications
The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pres...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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World Academy of Science, Engineering and Technology
2015
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| Online Access: | http://psasir.upm.edu.my/id/eprint/46851/ http://psasir.upm.edu.my/id/eprint/46851/1/Valuation%20on%20MEMS%20pressure%20sensors%20and%20device%20applications.pdf |
| _version_ | 1848850749964943360 |
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| author | Md Yunus, Nurul Amziah Abdul Halin, Izhal Sulaiman, Nasri Ismail, Noor Faezah Ong, Kai Sheng |
| author_facet | Md Yunus, Nurul Amziah Abdul Halin, Izhal Sulaiman, Nasri Ismail, Noor Faezah Ong, Kai Sheng |
| author_sort | Md Yunus, Nurul Amziah |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The
NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications. |
| first_indexed | 2025-11-15T10:11:15Z |
| format | Article |
| id | upm-46851 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T10:11:15Z |
| publishDate | 2015 |
| publisher | World Academy of Science, Engineering and Technology |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-468512018-01-30T10:44:48Z http://psasir.upm.edu.my/id/eprint/46851/ Valuation on MEMS pressure sensors and device applications Md Yunus, Nurul Amziah Abdul Halin, Izhal Sulaiman, Nasri Ismail, Noor Faezah Ong, Kai Sheng The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications. World Academy of Science, Engineering and Technology 2015 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/46851/1/Valuation%20on%20MEMS%20pressure%20sensors%20and%20device%20applications.pdf Md Yunus, Nurul Amziah and Abdul Halin, Izhal and Sulaiman, Nasri and Ismail, Noor Faezah and Ong, Kai Sheng (2015) Valuation on MEMS pressure sensors and device applications. International Journal of Electrical, Computer, Energetic, Electronic and Communication Engineering, 9 (8). pp. 768-776. ISSN 0950-4125 10.1108/09504121011045809 |
| spellingShingle | Md Yunus, Nurul Amziah Abdul Halin, Izhal Sulaiman, Nasri Ismail, Noor Faezah Ong, Kai Sheng Valuation on MEMS pressure sensors and device applications |
| title | Valuation on MEMS pressure sensors and device applications |
| title_full | Valuation on MEMS pressure sensors and device applications |
| title_fullStr | Valuation on MEMS pressure sensors and device applications |
| title_full_unstemmed | Valuation on MEMS pressure sensors and device applications |
| title_short | Valuation on MEMS pressure sensors and device applications |
| title_sort | valuation on mems pressure sensors and device applications |
| url | http://psasir.upm.edu.my/id/eprint/46851/ http://psasir.upm.edu.my/id/eprint/46851/ http://psasir.upm.edu.my/id/eprint/46851/1/Valuation%20on%20MEMS%20pressure%20sensors%20and%20device%20applications.pdf |