The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method

In this paper, the effect of nickel (Ni) catalyst on the growth of carbon nanotubes (CNTs) was studied where the CNTs were vertically grown by plasma enhanced chemical vapor deposition (PECVD) method. The growth conditions were fixed at a temperature of 700°C with a pressure of 1000mTorr for 40 minu...

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Main Authors: Mai, Woon Lee, Mohammad Haniff, Muhammad Aniq Shazni, Au, Shih Teh, C., Daniel S. Bien, Soo, Kien Chen, Talib, Zainal Abidin, Shaari, Abdul Halim
Format: Article
Language:English
Published: Trans Tech Publications 2015
Online Access:http://psasir.upm.edu.my/id/eprint/46562/
http://psasir.upm.edu.my/id/eprint/46562/1/The%20effect%20of%20Ni%20catalyst%20on%20the%20growth%20of%20multi-walled%20carbon%20nanotubes%20by%20PECVD%20method.pdf
_version_ 1848850687278972928
author Mai, Woon Lee
Mohammad Haniff, Muhammad Aniq Shazni
Au, Shih Teh
C., Daniel S. Bien
Soo, Kien Chen
Talib, Zainal Abidin
Shaari, Abdul Halim
author_facet Mai, Woon Lee
Mohammad Haniff, Muhammad Aniq Shazni
Au, Shih Teh
C., Daniel S. Bien
Soo, Kien Chen
Talib, Zainal Abidin
Shaari, Abdul Halim
author_sort Mai, Woon Lee
building UPM Institutional Repository
collection Online Access
description In this paper, the effect of nickel (Ni) catalyst on the growth of carbon nanotubes (CNTs) was studied where the CNTs were vertically grown by plasma enhanced chemical vapor deposition (PECVD) method. The growth conditions were fixed at a temperature of 700°C with a pressure of 1000mTorr for 40 minutes with various thicknesses of sputtered Ni catalyst. Experimental results show that high density of CNTs was observed especially towards thicker catalyst layers where larger and taller nanotubes were formed. The growth rate increases by ~0.7 times with increasing catalyst thickness from 4nm to 10nm. The nucleation of the catalyst with various thicknesses was also studied as the absorption of the carbon feedstock is dependent on the initial size of the catalyst island. From the Raman results, we found that only slight variation in the intensity ratio of G-band over D-band as increasing catalyst thicknesses. The minor difference in G/D ratio indicates that the catalyst thickness does not significantly influence the quality of CNTs grown.
first_indexed 2025-11-15T10:10:15Z
format Article
id upm-46562
institution Universiti Putra Malaysia
institution_category Local University
language English
last_indexed 2025-11-15T10:10:15Z
publishDate 2015
publisher Trans Tech Publications
recordtype eprints
repository_type Digital Repository
spelling upm-465622018-03-29T02:19:08Z http://psasir.upm.edu.my/id/eprint/46562/ The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method Mai, Woon Lee Mohammad Haniff, Muhammad Aniq Shazni Au, Shih Teh C., Daniel S. Bien Soo, Kien Chen Talib, Zainal Abidin Shaari, Abdul Halim In this paper, the effect of nickel (Ni) catalyst on the growth of carbon nanotubes (CNTs) was studied where the CNTs were vertically grown by plasma enhanced chemical vapor deposition (PECVD) method. The growth conditions were fixed at a temperature of 700°C with a pressure of 1000mTorr for 40 minutes with various thicknesses of sputtered Ni catalyst. Experimental results show that high density of CNTs was observed especially towards thicker catalyst layers where larger and taller nanotubes were formed. The growth rate increases by ~0.7 times with increasing catalyst thickness from 4nm to 10nm. The nucleation of the catalyst with various thicknesses was also studied as the absorption of the carbon feedstock is dependent on the initial size of the catalyst island. From the Raman results, we found that only slight variation in the intensity ratio of G-band over D-band as increasing catalyst thicknesses. The minor difference in G/D ratio indicates that the catalyst thickness does not significantly influence the quality of CNTs grown. Trans Tech Publications 2015 Article PeerReviewed text en http://psasir.upm.edu.my/id/eprint/46562/1/The%20effect%20of%20Ni%20catalyst%20on%20the%20growth%20of%20multi-walled%20carbon%20nanotubes%20by%20PECVD%20method.pdf Mai, Woon Lee and Mohammad Haniff, Muhammad Aniq Shazni and Au, Shih Teh and C., Daniel S. Bien and Soo, Kien Chen and Talib, Zainal Abidin and Shaari, Abdul Halim (2015) The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method. Advanced Materials Research, 1107. pp. 314-319. ISSN 1022-6680; ESSN: 1662-8985 10.4028/www.scientific.net/AMR.1107.314
spellingShingle Mai, Woon Lee
Mohammad Haniff, Muhammad Aniq Shazni
Au, Shih Teh
C., Daniel S. Bien
Soo, Kien Chen
Talib, Zainal Abidin
Shaari, Abdul Halim
The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method
title The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method
title_full The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method
title_fullStr The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method
title_full_unstemmed The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method
title_short The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method
title_sort effect of ni catalyst on the growth of multi-walled carbon nanotubes by pecvd method
url http://psasir.upm.edu.my/id/eprint/46562/
http://psasir.upm.edu.my/id/eprint/46562/
http://psasir.upm.edu.my/id/eprint/46562/1/The%20effect%20of%20Ni%20catalyst%20on%20the%20growth%20of%20multi-walled%20carbon%20nanotubes%20by%20PECVD%20method.pdf