Pressure sensors based on MEMS, operating in harsh environments (touch-mode)

Pressure sensors based on MEMS, operating in harsh environments (touch-mode)

In this paper, Poly-crystalline silicon carbide (poly-sic) Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment in touch mode is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation for a...

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Bibliographic Details
Main Authors: Hezarjaribi, Yadollah, Hamidon, Mohd Nizar, Bahadorimehr, Alireza
Format: Conference or Workshop Item
Language:English
Published: IEEE 2008
Online Access:http://psasir.upm.edu.my/id/eprint/45889/
http://psasir.upm.edu.my/id/eprint/45889/1/Pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments%20%28touch-mode%29.pdf

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