Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications

Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications

In this paper the effect of cobalt (Co) catalyst on the growth of carbon nanotubes (CNTs) was studied. CNTs were vertically grown by plasma enhanced chemical vapor deposition method (PECVD) at 700°C with various sputtered Co catalyst thicknesses. Experimental results shows that for carbon nanotube g...

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Bibliographic Details
Main Authors: Lee, Mai Woon, Md Razib, Nadia, Teh, Aun Shih, Bien, Daniel Chia Sheng, Chen, Soo Kien, Abdullah @ Ab. Aziz, Shahrul Azam
Format: Conference or Workshop Item
Language:English
Published: IEEE 2012
Online Access:http://psasir.upm.edu.my/id/eprint/45174/
http://psasir.upm.edu.my/id/eprint/45174/1/Effect%20of%20Co%20catalyst%20on%20PECVD%20growth%20of%20carbon%20nanotubes%20for%20NEMS%20applications.pdf

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