Ellipsometric study of Si1-x Gex alloy

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Ellipsometric study of Si1-x Gex alloy

A report on ellipsometric studies of Si0.5 Ge0.5 and Si0.7 Ge0.3 thin films is described. The samples were earlier prepared from SiGe disks of 3” diameter using RF magnetron sputtering and the films were deposited onto glass substrates at room temperature. Some of the optical properties were invest...

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Bibliographic Details
Main Authors:	Paiman, Suriati, Sakrani, Samsudi, Ismail, Bakar, Talib, Zainal Abidin
Format:	Article
Language:	English
Published:	Malaysian Solid State Science and Technology Society 2003
Online Access:	http://psasir.upm.edu.my/id/eprint/42200/ http://psasir.upm.edu.my/id/eprint/42200/1/Ellipsometric%20study%20of%20Si1-x%20Gex%20alloy.pdf

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