Ellipsometric study of Si1-x Gex alloy
A report on ellipsometric studies of Si0.5 Ge0.5 and Si0.7 Ge0.3 thin films is described. The samples were earlier prepared from SiGe disks of 3” diameter using RF magnetron sputtering and the films were deposited onto glass substrates at room temperature. Some of the optical properties were invest...
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| Format: | Article |
| Language: | English |
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Malaysian Solid State Science and Technology Society
2003
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| Online Access: | http://psasir.upm.edu.my/id/eprint/42200/ http://psasir.upm.edu.my/id/eprint/42200/1/Ellipsometric%20study%20of%20Si1-x%20Gex%20alloy.pdf |
| _version_ | 1848849900753649664 |
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| author | Paiman, Suriati Sakrani, Samsudi Ismail, Bakar Talib, Zainal Abidin |
| author_facet | Paiman, Suriati Sakrani, Samsudi Ismail, Bakar Talib, Zainal Abidin |
| author_sort | Paiman, Suriati |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | A report on ellipsometric studies of Si0.5 Ge0.5 and Si0.7 Ge0.3 thin films is described. The samples were earlier prepared from SiGe disks of 3” diameter using RF magnetron sputtering and the films were deposited onto glass substrates at room temperature. Some of the optical properties were investigated using an ellipsometer. In this method, we investigate the changes in refractive indices, n and extinction coefficients, k with film thickness as well as the relevant dielectric constant, ε. The results showed that, at a wavelength of 632.80 nm, n was found to increase with an increase of the germanium contents. |
| first_indexed | 2025-11-15T09:57:45Z |
| format | Article |
| id | upm-42200 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T09:57:45Z |
| publishDate | 2003 |
| publisher | Malaysian Solid State Science and Technology Society |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-422002016-04-12T02:24:40Z http://psasir.upm.edu.my/id/eprint/42200/ Ellipsometric study of Si1-x Gex alloy Paiman, Suriati Sakrani, Samsudi Ismail, Bakar Talib, Zainal Abidin A report on ellipsometric studies of Si0.5 Ge0.5 and Si0.7 Ge0.3 thin films is described. The samples were earlier prepared from SiGe disks of 3” diameter using RF magnetron sputtering and the films were deposited onto glass substrates at room temperature. Some of the optical properties were investigated using an ellipsometer. In this method, we investigate the changes in refractive indices, n and extinction coefficients, k with film thickness as well as the relevant dielectric constant, ε. The results showed that, at a wavelength of 632.80 nm, n was found to increase with an increase of the germanium contents. Malaysian Solid State Science and Technology Society 2003 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/42200/1/Ellipsometric%20study%20of%20Si1-x%20Gex%20alloy.pdf Paiman, Suriati and Sakrani, Samsudi and Ismail, Bakar and Talib, Zainal Abidin (2003) Ellipsometric study of Si1-x Gex alloy. Solid State Science and Technology, 11 (1). pp. 89-94. ISSN 0128-7389 http://masshp.net/journal/all%20journal/VOLUME%2011%20NO.%201,%202003/htm/Vol.%2011,%20No%201%20%282003%29%2089-94.htm |
| spellingShingle | Paiman, Suriati Sakrani, Samsudi Ismail, Bakar Talib, Zainal Abidin Ellipsometric study of Si1-x Gex alloy |
| title | Ellipsometric study of Si1-x Gex alloy |
| title_full | Ellipsometric study of Si1-x Gex alloy |
| title_fullStr | Ellipsometric study of Si1-x Gex alloy |
| title_full_unstemmed | Ellipsometric study of Si1-x Gex alloy |
| title_short | Ellipsometric study of Si1-x Gex alloy |
| title_sort | ellipsometric study of si1-x gex alloy |
| url | http://psasir.upm.edu.my/id/eprint/42200/ http://psasir.upm.edu.my/id/eprint/42200/ http://psasir.upm.edu.my/id/eprint/42200/1/Ellipsometric%20study%20of%20Si1-x%20Gex%20alloy.pdf |