Design and analysis of capacitive comb acceleration sensor for automotive applications

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Design and analysis of capacitive comb acceleration sensor for automotive applications

In the semiconductor industry, many electrical and electronic applications have been scaled down to the micron and nano scale using various technologies such as VLSI. This can be observed in Moore’s Law where more and more transistors have been fabricated into a single silicon wafer. While integrate...

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Bibliographic Details
Main Authors:	Chin, Yong Huan, Jaafar, Haslina, Md Yunus, Nurul Amziah
Format:	Conference or Workshop Item
Language:	English
Published:	The Society of Digital Information and Wireless Communications (SDIWC) 2014
Online Access:	http://psasir.upm.edu.my/id/eprint/39757/ http://psasir.upm.edu.my/id/eprint/39757/1/39757.pdf

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