Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review
Humidity measurement is one of the most significant issues in various areas of applications such as instrumentation, automated systems, agriculture, climatology and GIS. Numerous sorts of humidity sensors fabricated and developed for industrial and laboratory applications are reviewed and presented...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Multidisciplinary Digital Publishing Institute
2014
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| Online Access: | http://psasir.upm.edu.my/id/eprint/37896/ http://psasir.upm.edu.my/id/eprint/37896/1/37896.pdf |
| _version_ | 1848848730016448512 |
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| author | Farahani, Hamid Wagiran, Rahman Hamidon, Mohd Nizar |
| author_facet | Farahani, Hamid Wagiran, Rahman Hamidon, Mohd Nizar |
| author_sort | Farahani, Hamid |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | Humidity measurement is one of the most significant issues in various areas of applications such as instrumentation, automated systems, agriculture, climatology and GIS. Numerous sorts of humidity sensors fabricated and developed for industrial and laboratory applications are reviewed and presented in this article. The survey frequently concentrates on the RH sensors based upon their organic and inorganic functional materials, e.g., porous ceramics (semiconductors), polymers, ceramic/polymer and electrolytes, as well as conduction mechanism and fabrication technologies. A significant aim of this review is to provide a distinct categorization pursuant to state of the art humidity sensor types, principles of work, sensing substances, transduction mechanisms, and production technologies. Furthermore, performance characteristics of the different humidity sensors such as electrical and statistical data will be detailed and gives an added value to the report. By comparison of overall prospects of the sensors it was revealed that there are still drawbacks as to efficiency of sensing elements and conduction values. The flexibility offered by thick film and thin film processes either in the preparation of materials or in the choice of shape and size of the sensor structure provides advantages over other technologies. These ceramic sensors show faster response than other types. |
| first_indexed | 2025-11-15T09:39:08Z |
| format | Article |
| id | upm-37896 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T09:39:08Z |
| publishDate | 2014 |
| publisher | Multidisciplinary Digital Publishing Institute |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-378962015-12-21T06:25:42Z http://psasir.upm.edu.my/id/eprint/37896/ Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review Farahani, Hamid Wagiran, Rahman Hamidon, Mohd Nizar Humidity measurement is one of the most significant issues in various areas of applications such as instrumentation, automated systems, agriculture, climatology and GIS. Numerous sorts of humidity sensors fabricated and developed for industrial and laboratory applications are reviewed and presented in this article. The survey frequently concentrates on the RH sensors based upon their organic and inorganic functional materials, e.g., porous ceramics (semiconductors), polymers, ceramic/polymer and electrolytes, as well as conduction mechanism and fabrication technologies. A significant aim of this review is to provide a distinct categorization pursuant to state of the art humidity sensor types, principles of work, sensing substances, transduction mechanisms, and production technologies. Furthermore, performance characteristics of the different humidity sensors such as electrical and statistical data will be detailed and gives an added value to the report. By comparison of overall prospects of the sensors it was revealed that there are still drawbacks as to efficiency of sensing elements and conduction values. The flexibility offered by thick film and thin film processes either in the preparation of materials or in the choice of shape and size of the sensor structure provides advantages over other technologies. These ceramic sensors show faster response than other types. Multidisciplinary Digital Publishing Institute 2014 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/37896/1/37896.pdf Farahani, Hamid and Wagiran, Rahman and Hamidon, Mohd Nizar (2014) Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review. Sensors, 14 (5). pp. 7881-7939. ISSN 1424-8220 http://www.mdpi.com/1424-8220/14/5/7881 10.3390/s140507881 |
| spellingShingle | Farahani, Hamid Wagiran, Rahman Hamidon, Mohd Nizar Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review |
| title | Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review |
| title_full | Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review |
| title_fullStr | Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review |
| title_full_unstemmed | Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review |
| title_short | Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review |
| title_sort | humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review |
| url | http://psasir.upm.edu.my/id/eprint/37896/ http://psasir.upm.edu.my/id/eprint/37896/ http://psasir.upm.edu.my/id/eprint/37896/ http://psasir.upm.edu.my/id/eprint/37896/1/37896.pdf |