A comprehensive study on RF MEMS switch
This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, ins...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Springer
2014
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| Online Access: | http://psasir.upm.edu.my/id/eprint/36147/ http://psasir.upm.edu.my/id/eprint/36147/1/A%20comprehensive%20study%20on%20RF%20MEMS%20switch.pdf |
| _version_ | 1848848251226161152 |
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| author | Jaafar, Haslina Beh, Kean Sheng Md Yunus, Nurul Amziah Wan Hasan, Wan Zuha Shafie, Suhaidi Sidek, Othman |
| author_facet | Jaafar, Haslina Beh, Kean Sheng Md Yunus, Nurul Amziah Wan Hasan, Wan Zuha Shafie, Suhaidi Sidek, Othman |
| author_sort | Jaafar, Haslina |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed. |
| first_indexed | 2025-11-15T09:31:32Z |
| format | Article |
| id | upm-36147 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T09:31:32Z |
| publishDate | 2014 |
| publisher | Springer |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-361472015-12-18T05:30:22Z http://psasir.upm.edu.my/id/eprint/36147/ A comprehensive study on RF MEMS switch Jaafar, Haslina Beh, Kean Sheng Md Yunus, Nurul Amziah Wan Hasan, Wan Zuha Shafie, Suhaidi Sidek, Othman This paper emphasis on state-of-the-art of the earlier until the current trend and demand, principles, design considerations, key performance and fabrication technology of RF MEMS switch devices developed over the past few years. RF MEMS switch performance and features such as actuation voltage, insertion loss, isolation and ease with cost of fabrication and applications are compared and discussed. Springer 2014 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/36147/1/A%20comprehensive%20study%20on%20RF%20MEMS%20switch.pdf Jaafar, Haslina and Beh, Kean Sheng and Md Yunus, Nurul Amziah and Wan Hasan, Wan Zuha and Shafie, Suhaidi and Sidek, Othman (2014) A comprehensive study on RF MEMS switch. Microsystem Technologies, 20 (12). pp. 2109-2121. ISSN 0946-7076; ESSN: 1432-1858 http://link.springer.com/article/10.1007%2Fs00542-014-2276-7 10.1007/s00542-014-2276-7 |
| spellingShingle | Jaafar, Haslina Beh, Kean Sheng Md Yunus, Nurul Amziah Wan Hasan, Wan Zuha Shafie, Suhaidi Sidek, Othman A comprehensive study on RF MEMS switch |
| title | A comprehensive study on RF MEMS switch |
| title_full | A comprehensive study on RF MEMS switch |
| title_fullStr | A comprehensive study on RF MEMS switch |
| title_full_unstemmed | A comprehensive study on RF MEMS switch |
| title_short | A comprehensive study on RF MEMS switch |
| title_sort | comprehensive study on rf mems switch |
| url | http://psasir.upm.edu.my/id/eprint/36147/ http://psasir.upm.edu.my/id/eprint/36147/ http://psasir.upm.edu.my/id/eprint/36147/ http://psasir.upm.edu.my/id/eprint/36147/1/A%20comprehensive%20study%20on%20RF%20MEMS%20switch.pdf |