Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene

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Plasma polymerization. IV. A systematic investigation of the inductively coupled RF plasma polymerization of pentafluorobenzene

The composition and gross structural features of plasma polymer films prepared by inductively coupled RF plasmas excited in pentafluorobenzene were investigated by ESCA as a function of the operating parameters. The rate of film deposition is dependent on the W/FM parameter and on site of deposition...

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Bibliographic Details
Main Authors:	Clark, D. T., Abrahman, M. Z.
Format:	Article
Language:	English
Published:	John Wiley & Sons, Inc. 1981
Online Access:	http://psasir.upm.edu.my/id/eprint/33912/ http://psasir.upm.edu.my/id/eprint/33912/1/33912%20PLASMA%20POLYMERIZATION%20IV..pdf

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