Design and fabrication of silicon nanowire based sensor

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Design and fabrication of silicon nanowire based sensor

This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a starting material, the nanowires is fabricated using a top-down approach which...

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Bibliographic Details
Main Authors:	Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Hashim, Uda, Md Nor, M. Nuzaihan
Format:	Article
Language:	English English
Published:	Electrochemical Science Group 2013
Online Access:	http://psasir.upm.edu.my/id/eprint/30181/ http://psasir.upm.edu.my/id/eprint/30181/1/Design%20and%20fabrication%20of%20silicon%20nanowire%20based%20sensor.pdf

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