APA (7th ed.) Citation

Hezarjaribi, Y., & Hamidon, M. N. (2013). Reactive ion etching of 4H-SiC using SF6/O2 for MEMS application.

Chicago Style (17th ed.) Citation

Hezarjaribi, Yadollah, and Mohd Nizar Hamidon. Reactive Ion Etching of 4H-SiC Using SF6/O2 for MEMS Application. 2013.

MLA (9th ed.) Citation

Hezarjaribi, Yadollah, and Mohd Nizar Hamidon. Reactive Ion Etching of 4H-SiC Using SF6/O2 for MEMS Application. 2013.

Warning: These citations may not always be 100% accurate.