3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles

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3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles

This paper presents the 3-dimensional (3D) computational fluid dynamics (CFD) simulation study of metal organic chemical vapor deposition (MOCVD) producing photocatalytic titanium dioxide (TiO2) nanoparticles. It aims to provide better understanding of the MOCVD synthesis system especially of deposi...

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Bibliographic Details
Main Authors:	Othman, Siti Hajar, Abdul Rashid, Suraya, Abdullah, Norhafizah, Mohd Ghazi, Tinia Idaty
Format:	Article
Published:	2013
Online Access:	http://psasir.upm.edu.my/id/eprint/28575/

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