3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles
This paper presents the 3-dimensional (3D) computational fluid dynamics (CFD) simulation study of metal organic chemical vapor deposition (MOCVD) producing photocatalytic titanium dioxide (TiO2) nanoparticles. It aims to provide better understanding of the MOCVD synthesis system especially of deposi...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
2013
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| Online Access: | http://psasir.upm.edu.my/id/eprint/28575/ |
| _version_ | 1848846154924556288 |
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| author | Othman, Siti Hajar Abdul Rashid, Suraya Abdullah, Norhafizah Mohd Ghazi, Tinia Idaty |
| author_facet | Othman, Siti Hajar Abdul Rashid, Suraya Abdullah, Norhafizah Mohd Ghazi, Tinia Idaty |
| author_sort | Othman, Siti Hajar |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | This paper presents the 3-dimensional (3D) computational fluid dynamics (CFD) simulation study of metal organic chemical vapor deposition (MOCVD) producing photocatalytic titanium dioxide (TiO2) nanoparticles. It aims to provide better understanding of the MOCVD synthesis system especially of deposition process of TiO2 nanoparticles as well as fluid dynamics inside the reactor. The simulated model predicts temperature, velocity, gas streamline, mass fraction of reactants and products, kinetic rate of reaction, and surface deposition rate profiles. It was found that temperature distribution, flow pattern, and thermophoretic force considerably affected the deposition behavior of TiO2 nanoparticles. Good mixing of nitrogen (N2) carrier gas and oxygen (O2) feed gas is important to ensure uniform deposition and the quality of the nanoparticles produced. Simulation results are verified by experiment where possible due to limited available experimental data. Good agreement between experimental and simulation results supports the reliability of simulation work. |
| first_indexed | 2025-11-15T08:58:12Z |
| format | Article |
| id | upm-28575 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-15T08:58:12Z |
| publishDate | 2013 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-285752016-02-11T07:21:52Z http://psasir.upm.edu.my/id/eprint/28575/ 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles Othman, Siti Hajar Abdul Rashid, Suraya Abdullah, Norhafizah Mohd Ghazi, Tinia Idaty This paper presents the 3-dimensional (3D) computational fluid dynamics (CFD) simulation study of metal organic chemical vapor deposition (MOCVD) producing photocatalytic titanium dioxide (TiO2) nanoparticles. It aims to provide better understanding of the MOCVD synthesis system especially of deposition process of TiO2 nanoparticles as well as fluid dynamics inside the reactor. The simulated model predicts temperature, velocity, gas streamline, mass fraction of reactants and products, kinetic rate of reaction, and surface deposition rate profiles. It was found that temperature distribution, flow pattern, and thermophoretic force considerably affected the deposition behavior of TiO2 nanoparticles. Good mixing of nitrogen (N2) carrier gas and oxygen (O2) feed gas is important to ensure uniform deposition and the quality of the nanoparticles produced. Simulation results are verified by experiment where possible due to limited available experimental data. Good agreement between experimental and simulation results supports the reliability of simulation work. 2013 Article PeerReviewed Othman, Siti Hajar and Abdul Rashid, Suraya and Abdullah, Norhafizah and Mohd Ghazi, Tinia Idaty (2013) 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles. Journal of Nanomaterials, 2013 (Article ID 123256). 11-Jan. ISSN 1687-4110 http://dx.doi.org/10.1155/2013/123256 10.1155/2013/123256 |
| spellingShingle | Othman, Siti Hajar Abdul Rashid, Suraya Abdullah, Norhafizah Mohd Ghazi, Tinia Idaty 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles |
| title | 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles |
| title_full | 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles |
| title_fullStr | 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles |
| title_full_unstemmed | 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles |
| title_short | 3D CFD Simulations of MOCVD Synthesis System of Titanium Dioxide Nanoparticles |
| title_sort | 3d cfd simulations of mocvd synthesis system of titanium dioxide nanoparticles |
| url | http://psasir.upm.edu.my/id/eprint/28575/ http://psasir.upm.edu.my/id/eprint/28575/ http://psasir.upm.edu.my/id/eprint/28575/ |