Particle reduction at metal deposition process in wafer fabrication.
| Main Authors: | , , , |
|---|---|
| Format: | Book Section |
| Published: |
InTech
2012
|
| Online Access: | http://psasir.upm.edu.my/id/eprint/26269/ |
| _version_ | 1848845535853674496 |
|---|---|
| author | Abdul Aziz, Faieza Ahmad, Izham Hazizi Zulkifli, Norzima Mohd. Yusuff, Rosnah |
| author2 | Abdul Aziz, Faieza |
| author_facet | Abdul Aziz, Faieza Abdul Aziz, Faieza Ahmad, Izham Hazizi Zulkifli, Norzima Mohd. Yusuff, Rosnah |
| author_sort | Abdul Aziz, Faieza |
| building | UPM Institutional Repository |
| collection | Online Access |
| first_indexed | 2025-11-15T08:48:22Z |
| format | Book Section |
| id | upm-26269 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| last_indexed | 2025-11-15T08:48:22Z |
| publishDate | 2012 |
| publisher | InTech |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-262692014-03-11T01:02:03Z http://psasir.upm.edu.my/id/eprint/26269/ Particle reduction at metal deposition process in wafer fabrication. Abdul Aziz, Faieza Ahmad, Izham Hazizi Zulkifli, Norzima Mohd. Yusuff, Rosnah InTech Abdul Aziz, Faieza 2012-05-16 Book Section PeerReviewed Abdul Aziz, Faieza and Ahmad, Izham Hazizi and Zulkifli, Norzima and Mohd. Yusuff, Rosnah (2012) Particle reduction at metal deposition process in wafer fabrication. In: Manufacturing System. InTech, Rijeka, Croatia, pp. 1-26. ISBN 9789535105305 10.5772/38239 |
| spellingShingle | Abdul Aziz, Faieza Ahmad, Izham Hazizi Zulkifli, Norzima Mohd. Yusuff, Rosnah Particle reduction at metal deposition process in wafer fabrication. |
| title | Particle reduction at metal deposition process in wafer fabrication. |
| title_full | Particle reduction at metal deposition process in wafer fabrication. |
| title_fullStr | Particle reduction at metal deposition process in wafer fabrication. |
| title_full_unstemmed | Particle reduction at metal deposition process in wafer fabrication. |
| title_short | Particle reduction at metal deposition process in wafer fabrication. |
| title_sort | particle reduction at metal deposition process in wafer fabrication. |
| url | http://psasir.upm.edu.my/id/eprint/26269/ http://psasir.upm.edu.my/id/eprint/26269/ |