APA (7th ed.) Citation

Abdul Aziz, F., Ahmad, I. H., Zulkifli, N., & Mohd. Yusuff, R. (2012). Particle reduction at metal deposition process in wafer fabrication. InTech.

Chicago Style (17th ed.) Citation

Abdul Aziz, Faieza, Izham Hazizi Ahmad, Norzima Zulkifli, and Rosnah Mohd. Yusuff. Particle Reduction at Metal Deposition Process in Wafer Fabrication. InTech, 2012.

MLA (9th ed.) Citation

Abdul Aziz, Faieza, et al. Particle Reduction at Metal Deposition Process in Wafer Fabrication. InTech, 2012.