SnO2/Pt thin film laser ablated gas sensor array

A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing an...

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Main Authors: Abadi, Mohammad Hadi Nezhad Shahrokh, Hamidon, Mohd Nizar, Shaari, Abdul Halim, Abdullah, Norhafizah, Wagiran, Rahman
Format: Article
Language:English
Published: MDPI 2011
Online Access:http://psasir.upm.edu.my/id/eprint/24981/
http://psasir.upm.edu.my/id/eprint/24981/1/24981.pdf
_version_ 1848845184548208640
author Abadi, Mohammad Hadi Nezhad Shahrokh
Hamidon, Mohd Nizar
Shaari, Abdul Halim
Abdullah, Norhafizah
Wagiran, Rahman
author_facet Abadi, Mohammad Hadi Nezhad Shahrokh
Hamidon, Mohd Nizar
Shaari, Abdul Halim
Abdullah, Norhafizah
Wagiran, Rahman
author_sort Abadi, Mohammad Hadi Nezhad Shahrokh
building UPM Institutional Repository
collection Online Access
description A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times.
first_indexed 2025-11-15T08:42:47Z
format Article
id upm-24981
institution Universiti Putra Malaysia
institution_category Local University
language English
last_indexed 2025-11-15T08:42:47Z
publishDate 2011
publisher MDPI
recordtype eprints
repository_type Digital Repository
spelling upm-249812020-07-27T07:00:18Z http://psasir.upm.edu.my/id/eprint/24981/ SnO2/Pt thin film laser ablated gas sensor array Abadi, Mohammad Hadi Nezhad Shahrokh Hamidon, Mohd Nizar Shaari, Abdul Halim Abdullah, Norhafizah Wagiran, Rahman A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times. MDPI 2011 Article PeerReviewed text en http://psasir.upm.edu.my/id/eprint/24981/1/24981.pdf Abadi, Mohammad Hadi Nezhad Shahrokh and Hamidon, Mohd Nizar and Shaari, Abdul Halim and Abdullah, Norhafizah and Wagiran, Rahman (2011) SnO2/Pt thin film laser ablated gas sensor array. Sensors, 11 (8). pp. 7724-7735. ISSN 1424-8220 https://www.mdpi.com/1424-8220/11/8/7724 10.3390/s110807724
spellingShingle Abadi, Mohammad Hadi Nezhad Shahrokh
Hamidon, Mohd Nizar
Shaari, Abdul Halim
Abdullah, Norhafizah
Wagiran, Rahman
SnO2/Pt thin film laser ablated gas sensor array
title SnO2/Pt thin film laser ablated gas sensor array
title_full SnO2/Pt thin film laser ablated gas sensor array
title_fullStr SnO2/Pt thin film laser ablated gas sensor array
title_full_unstemmed SnO2/Pt thin film laser ablated gas sensor array
title_short SnO2/Pt thin film laser ablated gas sensor array
title_sort sno2/pt thin film laser ablated gas sensor array
url http://psasir.upm.edu.my/id/eprint/24981/
http://psasir.upm.edu.my/id/eprint/24981/
http://psasir.upm.edu.my/id/eprint/24981/
http://psasir.upm.edu.my/id/eprint/24981/1/24981.pdf