Metrology at nanoscale: thermal wave probe made it simple

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Metrology at nanoscale: thermal wave probe made it simple

A major hurdle facing nanotechnology implementation is in how samples of nano-scale dimensions can be probed. Parts of the problems include sample mounting, making contact with the sample; the possibility that the act of measuring alters the sample, repeatability and accuracy of measurement and refe...

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Bibliographic Details
Main Author:	Abd. Moksin, Mohd Maarof
Format:	Inaugural Lecture
Language:	English English
Published:	Universiti Putra Malaysia Press 2008
Online Access:	http://psasir.upm.edu.my/id/eprint/18217/ http://psasir.upm.edu.my/id/eprint/18217/1/cover%20Inaugural%20Dr.Maarof.pdf http://psasir.upm.edu.my/id/eprint/18217/6/PROF.%20MAAROF%20INAUGURAL.pdf

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