High-isolation and low-loss RF MEMS shunt switches
This paper presents the design and simulation of a radio frequency (RF) microelectromechanical system (MEMS) shunt switch using a three-dimensional RF simulator, Em3ds10 (2008 version) software for the frequency range of 1-40 GHz. The shunt capacitive switch is electrostatic actuated and designed wi...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Applied Computational Electromagnetics Society
2010
|
| Online Access: | http://psasir.upm.edu.my/id/eprint/15009/ http://psasir.upm.edu.my/id/eprint/15009/1/High-isolation%20and%20low-loss%20RF%20MEMS%20shunt%20switches.pdf |
| _version_ | 1848842557230940160 |
|---|---|
| author | Jaafar, Haslina Sidek, Othman Miskam, Muhamad Azman Abdul Rahman, Muhammad Razi |
| author_facet | Jaafar, Haslina Sidek, Othman Miskam, Muhamad Azman Abdul Rahman, Muhammad Razi |
| author_sort | Jaafar, Haslina |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | This paper presents the design and simulation of a radio frequency (RF) microelectromechanical system (MEMS) shunt switch using a three-dimensional RF simulator, Em3ds10 (2008 version) software for the frequency range of 1-40 GHz. The shunt capacitive switch is electrostatic actuated and designed with a meander beam support to lower the pull-in voltage. Fast simulations of complex structures based on a method-of-moment approach allow for optimal design of MEMS switch. The switch has a simulated pull-in voltage of 2.5 V and the RF performances of insertion loss and isolation are less than -0.2 dB and -50 dB at 12 GHz, respectively. |
| first_indexed | 2025-11-15T08:01:01Z |
| format | Article |
| id | upm-15009 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T08:01:01Z |
| publishDate | 2010 |
| publisher | Applied Computational Electromagnetics Society |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-150092019-05-08T07:49:38Z http://psasir.upm.edu.my/id/eprint/15009/ High-isolation and low-loss RF MEMS shunt switches Jaafar, Haslina Sidek, Othman Miskam, Muhamad Azman Abdul Rahman, Muhammad Razi This paper presents the design and simulation of a radio frequency (RF) microelectromechanical system (MEMS) shunt switch using a three-dimensional RF simulator, Em3ds10 (2008 version) software for the frequency range of 1-40 GHz. The shunt capacitive switch is electrostatic actuated and designed with a meander beam support to lower the pull-in voltage. Fast simulations of complex structures based on a method-of-moment approach allow for optimal design of MEMS switch. The switch has a simulated pull-in voltage of 2.5 V and the RF performances of insertion loss and isolation are less than -0.2 dB and -50 dB at 12 GHz, respectively. Applied Computational Electromagnetics Society 2010 Article PeerReviewed text en http://psasir.upm.edu.my/id/eprint/15009/1/High-isolation%20and%20low-loss%20RF%20MEMS%20shunt%20switches.pdf Jaafar, Haslina and Sidek, Othman and Miskam, Muhamad Azman and Abdul Rahman, Muhammad Razi (2010) High-isolation and low-loss RF MEMS shunt switches. Applied Computational Electromagnetics Society Journal, 25 (9). pp. 780-786. ISSN 1054-4887 http://www.aces-society.org/search.php?vol=25&no=9&type=2 |
| spellingShingle | Jaafar, Haslina Sidek, Othman Miskam, Muhamad Azman Abdul Rahman, Muhammad Razi High-isolation and low-loss RF MEMS shunt switches |
| title | High-isolation and low-loss RF MEMS shunt switches |
| title_full | High-isolation and low-loss RF MEMS shunt switches |
| title_fullStr | High-isolation and low-loss RF MEMS shunt switches |
| title_full_unstemmed | High-isolation and low-loss RF MEMS shunt switches |
| title_short | High-isolation and low-loss RF MEMS shunt switches |
| title_sort | high-isolation and low-loss rf mems shunt switches |
| url | http://psasir.upm.edu.my/id/eprint/15009/ http://psasir.upm.edu.my/id/eprint/15009/ http://psasir.upm.edu.my/id/eprint/15009/1/High-isolation%20and%20low-loss%20RF%20MEMS%20shunt%20switches.pdf |