Design, simulation and modeling of high Q RF MEMS inductor
Silicon integrated circuit spiral inductors and transformers are finding wide ranging applications in RF circuits. This paper presents implementation and characterization of spiral inductor using MEMS technology on silicon substrate for use in design of voltage controlled oscillator (VCO). MEMS indu...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Praise Worthy Prize
2008
|
| Online Access: | http://psasir.upm.edu.my/id/eprint/13919/ http://psasir.upm.edu.my/id/eprint/13919/1/Design.pdf |
| _version_ | 1848842248784969728 |
|---|---|
| author | Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais Mousavi, Sayed Alireza Bayat, Mehdi |
| author_facet | Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais Mousavi, Sayed Alireza Bayat, Mehdi |
| author_sort | Rahimi, Maryam |
| building | UPM Institutional Repository |
| collection | Online Access |
| description | Silicon integrated circuit spiral inductors and transformers are finding wide ranging applications in RF circuits. This paper presents implementation and characterization of spiral inductor using MEMS technology on silicon substrate for use in design of voltage controlled oscillator (VCO). MEMS inductors have been realized from the CMOS-compatible MEMS process. Suspended inductor has been employed in design to avoid substrate coupling. The dimensions of the inductor have been obtained using the Greenhouse formula. The inductors have been simulated using CoventorWare software. The Yue's model has been applied to compute lumped equivalent parameters and Q factor of the inductors. The resultant value of inductance and Q factor are 2.87nH and 27 respectively at 2.4 GHz, which are in good agreement with the results of Greenhouse formula. |
| first_indexed | 2025-11-15T07:56:07Z |
| format | Article |
| id | upm-13919 |
| institution | Universiti Putra Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T07:56:07Z |
| publishDate | 2008 |
| publisher | Praise Worthy Prize |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | upm-139192015-10-30T01:40:35Z http://psasir.upm.edu.my/id/eprint/13919/ Design, simulation and modeling of high Q RF MEMS inductor Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais Mousavi, Sayed Alireza Bayat, Mehdi Silicon integrated circuit spiral inductors and transformers are finding wide ranging applications in RF circuits. This paper presents implementation and characterization of spiral inductor using MEMS technology on silicon substrate for use in design of voltage controlled oscillator (VCO). MEMS inductors have been realized from the CMOS-compatible MEMS process. Suspended inductor has been employed in design to avoid substrate coupling. The dimensions of the inductor have been obtained using the Greenhouse formula. The inductors have been simulated using CoventorWare software. The Yue's model has been applied to compute lumped equivalent parameters and Q factor of the inductors. The resultant value of inductance and Q factor are 2.87nH and 27 respectively at 2.4 GHz, which are in good agreement with the results of Greenhouse formula. Praise Worthy Prize 2008-12 Article PeerReviewed application/pdf en http://psasir.upm.edu.my/id/eprint/13919/1/Design.pdf Rahimi, Maryam and Jamuar, Sudhanshu Shekhar and Hamidon, Mohd Nizar and Ahmad, Mohd Rais and Mousavi, Sayed Alireza and Bayat, Mehdi (2008) Design, simulation and modeling of high Q RF MEMS inductor. International Review of Electrical Engineering, 3 (6). pp. 1048-1053. ISSN 1827-6660 |
| spellingShingle | Rahimi, Maryam Jamuar, Sudhanshu Shekhar Hamidon, Mohd Nizar Ahmad, Mohd Rais Mousavi, Sayed Alireza Bayat, Mehdi Design, simulation and modeling of high Q RF MEMS inductor |
| title | Design, simulation and modeling of high Q RF MEMS inductor |
| title_full | Design, simulation and modeling of high Q RF MEMS inductor |
| title_fullStr | Design, simulation and modeling of high Q RF MEMS inductor |
| title_full_unstemmed | Design, simulation and modeling of high Q RF MEMS inductor |
| title_short | Design, simulation and modeling of high Q RF MEMS inductor |
| title_sort | design, simulation and modeling of high q rf mems inductor |
| url | http://psasir.upm.edu.my/id/eprint/13919/ http://psasir.upm.edu.my/id/eprint/13919/1/Design.pdf |